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Investigation of grinding or mechanical polishing surface of 4H-SiC substrate

Authors :
R. Hiraide
M. Haraguchi
Toshihiro Okamoto
Source :
Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials.
Publication Year :
2018
Publisher :
The Japan Society of Applied Physics, 2018.

Subjects

Subjects :
Surface (mathematics)
Materials science
Sic substrate
Polishing
Composite material
Grinding

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials
Accession number :
edsair.doi...........b8a1218761868c0b2d467d9fd544a254
Full Text :
https://doi.org/10.7567/ssdm.2018.d-8-04
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