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High-Temperature Annealing Induced He Bubble Evolution in Low Energy He Ion Implanted 6H-SiC

Authors :
Yu-Zhu Liu
Bingsheng Li
Li Zhang
Source :
Chinese Physics Letters. 34:052801
Publication Year :
2017
Publisher :
IOP Publishing, 2017.

Subjects

Subjects :
010302 applied physics
Materials science
Low energy
Annealing (metallurgy)
Bubble
0103 physical sciences
General Physics and Astronomy
02 engineering and technology
021001 nanoscience & nanotechnology
0210 nano-technology
01 natural sciences
Molecular physics
Ion

Details

ISSN :
17413540 and 0256307X
Volume :
34
Database :
OpenAIRE
Journal :
Chinese Physics Letters
Accession number :
edsair.doi...........b880dfbb6435cd3b386ae0df18fdbfc4

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