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Growth of Amorphous Titanium-Oxide Thin Films by Using Different Oxygen Partial Pressures

Authors :
Hyeok Jee
Jin-Soo Kim
Hye-Won Seo
Source :
New Physics: Sae Mulli. 67:1399-1403
Publication Year :
2017
Publisher :
Korean Physical Society, 2017.

Subjects

Subjects :
Amorphous semiconductors
Materials science
Chemical engineering
chemistry
General Physics and Astronomy
chemistry.chemical_element
Partial pressure
Thin film
Oxygen
Titanium oxide
Amorphous solid

Details

ISSN :
22890041 and 03744914
Volume :
67
Database :
OpenAIRE
Journal :
New Physics: Sae Mulli
Accession number :
edsair.doi...........b832c57d410166eafb8b7f5a04454131
Full Text :
https://doi.org/10.3938/npsm.67.1399
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