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MEMS-based multiple fourier-horn silicon ultrasonic atomizer for inhalation drug delivery

Authors :
Shih K. Lin
Shirley C. Tsai
Chen S. Tsai
Eric Chien
Rong W. Mao
Source :
2011 IEEE International Ultrasonics Symposium.
Publication Year :
2011
Publisher :
IEEE, 2011.

Subjects

Subjects :
Microelectromechanical systems
Materials science
Inhalation
Silicon
chemistry.chemical_element
Nanotechnology
Ultrasonic atomization
symbols.namesake
Fourier transform
chemistry
Ultrasonic atomizer
Horn (acoustic)
Drug delivery
symbols
Biomedical engineering

Details

Database :
OpenAIRE
Journal :
2011 IEEE International Ultrasonics Symposium
Accession number :
edsair.doi...........b82d3abdb9de5f0a6fb7a9ec8c5b28a0
Full Text :
https://doi.org/10.1109/ultsym.2011.0275
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