Study on the Fabrication and Properties of Mo-S-C Multicomponent Film

A Mo-S-C multicomponent film is prepared by ion beam assisted deposition (IBAD) combined with low temperature ion sulfurization. The microstructural analyses and the tribological performance are performed on the scanning electron microscope (SEM), three-dimensional white profile meter, Raman spectrum, Nano-hardness tester and UMT friction tester. The result shows that the composite structure, composed of strengthening phase nanocrystallites MoC1-x and lubricative MoS2, FeS, which uniformly dispersed in the amorphous C matrix, is the crucial factor of the excellent tribological performance.