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Three-dimensional finite-element simulations of a scanning microwave microscope cantilever for imaging at the nanoscale
- Source :
- Applied Physics Letters. 103:213106
- Publication Year :
- 2013
- Publisher :
- AIP Publishing, 2013.
-
Abstract
- We use three-dimensional finite-element numerical simulations to fully characterize the electromagnetic interactions between a metallic nano-tip and cantilever that are part of a scanning microwave microscopy (SMM) system and dielectric samples. In particular, we use this rigorous computational technique to analyze and validate a recently developed SMM calibration procedure for complex impedance measurements in reflection mode. Our simulations show that relatively small changes in the conductivity of the substrates can cause significant variations in the measured reflection coefficient. In addition, we demonstrate that the bulk systemic impedance is extremely sensitive to modifications of system parameters, namely, variations in the cantilever inclination angle as small as 1° cause changes in system impedance that can be larger than 10%. Finally, the main experimental implications of these results to SMM imaging and calibration are identified and discussed.
- Subjects :
- 010302 applied physics
Microscope
Cantilever
Materials science
Physics and Astronomy (miscellaneous)
business.industry
Analytical chemistry
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Finite element method
law.invention
Optics
law
0103 physical sciences
Microscopy
Reflection (physics)
Reflection coefficient
0210 nano-technology
business
Electrical impedance
Microwave
Subjects
Details
- ISSN :
- 10773118 and 00036951
- Volume :
- 103
- Database :
- OpenAIRE
- Journal :
- Applied Physics Letters
- Accession number :
- edsair.doi...........b759974d25413cc8eaaf7c2b3a7b2d97