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Effect of Al2O3 on structural dynamics and dielectric properties of lithium metasilicate photoetchable glasses as an interposer technology for microwave integrated circuits
- Source :
- Ceramics International. 46:18032-18036
- Publication Year :
- 2020
- Publisher :
- Elsevier BV, 2020.
-
Abstract
- Photoetchable glasses (PEG) are widely used as interposers in radio frequency electronic systems. However, high dielectric losses limit the utilization of PEGs in three-dimensional integrated microsystems. Herein, the internal structure of PEGs is shown to be altered by the addition of Al2O3 and its influence on dielectric properties systematically studied by X-ray diffraction, Raman spectroscopy and FT-infrared spectroscopy (FTIR). The Al2O3 content significantly influences the ring structure and an amount equal to 4 wt% results in a high degree of crystallinity and phase purity of lithium metasilicate. Lastly, a dielectric constant of 5.1 and dielectric loss of 3 × 10-3 were obtained at 1 GHz, which is attributed to weakened structural vibrations, without loss to attractive etching properties.
- Subjects :
- 010302 applied physics
Lithium metasilicate
Materials science
Process Chemistry and Technology
02 engineering and technology
Dielectric
021001 nanoscience & nanotechnology
01 natural sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
chemistry.chemical_compound
Crystallinity
symbols.namesake
chemistry
0103 physical sciences
Materials Chemistry
Ceramics and Composites
Interposer
symbols
Dielectric loss
Composite material
0210 nano-technology
Raman spectroscopy
Spectroscopy
Microwave
Subjects
Details
- ISSN :
- 02728842
- Volume :
- 46
- Database :
- OpenAIRE
- Journal :
- Ceramics International
- Accession number :
- edsair.doi...........b7036ae1e1c1cac3a460db06238129e7