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Chemical vapor deposition of Si3N4 onto metal substrates
- Publication Year :
- 1991
- Publisher :
- Elsevier, 1991.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........b6c3d76370ebb165e2805291461967a7
- Full Text :
- https://doi.org/10.1016/b978-0-444-89455-7.50010-1