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Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering

Authors :
C Corbella
Source :
Surface and Coatings Technology.
Publication Year :
2003
Publisher :
Elsevier BV, 2003.

Subjects

Subjects :
Materials Chemistry
Surfaces and Interfaces
General Chemistry
Condensed Matter Physics
Surfaces, Coatings and Films

Details

ISSN :
02578972
Database :
OpenAIRE
Journal :
Surface and Coatings Technology
Accession number :
edsair.doi...........b57d95042abc036b72921551779d3032

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