Compositional Analysis and Electrical Property Measurements of CW Laser-Annealed InSb

Characteristics of CW Ar-ion laser annealed InSb has been studied; properties include stoichiometric composition analysis and electrical C-V measurements. The stoichiometry compositions of laser-annealed samples at different power levels and scan speeds have been studied using an electron microprobe technique. Results were compared with electrical C-V measurements using MOS structures.