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Novel Liquid Phase Epitaxy (LPE) Growth Method for Growing Large GaN Single Crystals: Introduction of the Flux Film Coated-Liquid Phase Epitaxy (FFC-LPE) Method

Authors :
Yusuke Mori
Kunimichi Omae
Masashi Yoshimura
Fumio Kawamura
Takatomo Sasaki
Masanori Morishita
Source :
Japanese Journal of Applied Physics. 42:L879-L881
Publication Year :
2003
Publisher :
IOP Publishing, 2003.

Abstract

We developed a new liquid phase epitaxy (LPE) growth method for growing large GaN single crystals. In this method, the homo-epitaxial growth of the GaN crystal proceeds by nitrogen dissolution against a Na-Ga solution film coating the GaN thin-film substrate. A growth rate of 4 µm/h was achieved though nitrogen pressure was relatively low at 9.5 atm. Furthermore, the GaN film grown by this method showed a flat surface.

Details

ISSN :
00214922
Volume :
42
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........b47a2880610f6fb22854d1550b254fb8
Full Text :
https://doi.org/10.1143/jjap.42.l879