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Novel Liquid Phase Epitaxy (LPE) Growth Method for Growing Large GaN Single Crystals: Introduction of the Flux Film Coated-Liquid Phase Epitaxy (FFC-LPE) Method
- Source :
- Japanese Journal of Applied Physics. 42:L879-L881
- Publication Year :
- 2003
- Publisher :
- IOP Publishing, 2003.
-
Abstract
- We developed a new liquid phase epitaxy (LPE) growth method for growing large GaN single crystals. In this method, the homo-epitaxial growth of the GaN crystal proceeds by nitrogen dissolution against a Na-Ga solution film coating the GaN thin-film substrate. A growth rate of 4 µm/h was achieved though nitrogen pressure was relatively low at 9.5 atm. Furthermore, the GaN film grown by this method showed a flat surface.
- Subjects :
- Materials science
Photoluminescence
Physics and Astronomy (miscellaneous)
business.industry
General Engineering
General Physics and Astronomy
chemistry.chemical_element
Substrate (electronics)
Epitaxy
Nitrogen
Crystal
Film coating
Crystallography
chemistry
Optoelectronics
business
Dissolution
Single crystal
Subjects
Details
- ISSN :
- 00214922
- Volume :
- 42
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........b47a2880610f6fb22854d1550b254fb8
- Full Text :
- https://doi.org/10.1143/jjap.42.l879