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15-GHz Epitaxial AlN FBARs on SiC Substrates

Authors :
Wenwen Zhao
Mohammad Javad Asadi
Lei Li
Reet Chaudhuri
Kazuki Nomoto
Huili Grace Xing
James C. M. Hwang
Debdeep Jena
Source :
IEEE Electron Device Letters. 44:903-906
Publication Year :
2023
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2023.

Subjects

Subjects :
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Details

ISSN :
15580563 and 07413106
Volume :
44
Database :
OpenAIRE
Journal :
IEEE Electron Device Letters
Accession number :
edsair.doi...........b35d3f1c4334ab8f15723463dd35abaa
Full Text :
https://doi.org/10.1109/led.2023.3268863
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