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Lapping of sapphire wafers by CVD diamond coated tools

Authors :
杨旭 Yang Xu
卢文壮 Lu Wenzhuang
蔡文俊 Cai Wen-jun
冯伟 Feng Wei
杨斌 Yang Bin
Source :
Optics and Precision Engineering. 24:540-546
Publication Year :
2016
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2016.

Subjects

Subjects :
Materials science
Lapping
business.industry
Sapphire
Optoelectronics
Wafer
Chemical vapor deposition
business
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :
1004924X
Volume :
24
Database :
OpenAIRE
Journal :
Optics and Precision Engineering
Accession number :
edsair.doi...........b2e9b7bb377fbaa39290682039d9a298

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