Thermochemical High-ordered Surface Structure Formation with an Astigmatic Gaussian Beam on Metal Thin Films

We present the results of high-ordered surface structure formation by femtosecond laser pulses $(\lambda$ =1026 nm, $\tau$ =232 fs) using an astigmatic Gaussian beam on the surface of thin metal films (thickness 30–40 nm) of Cr and Hf sputtered on the glass substrate. The difference in the structure quality and formation performance between the cases of Cr and Hf metal films was analyzed. The fabrication productivity increase by an order of magnitude was achieved in the case of Hf metal film.