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Ferroelectric enhancement of Al-doped HfO2 thin films by rapid electron beam annealing in a low thermal budget

Authors :
Ting-Yun Wang
Wei-Chung Kao
Yu-Tung Yin
Jay Shieh
Miin-Jang Chen
Source :
Journal of the European Ceramic Society. 42:4221-4226
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Subjects

Subjects :
Materials Chemistry
Ceramics and Composites

Details

ISSN :
09552219
Volume :
42
Database :
OpenAIRE
Journal :
Journal of the European Ceramic Society
Accession number :
edsair.doi...........b212abd2a0ce78a49394d764ec330e58

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