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Impact of doping on the stress evaluation of Si/3C-SiC hetero-epitaxy
- Publication Year :
- 2023
- Publisher :
- Zenodo, 2023.
-
Abstract
- Presentation done atE-MRS Spring Meeting2023 – Symposium.&nbsp
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........b1e6b79020ceaf920f24481358739383
- Full Text :
- https://doi.org/10.5281/zenodo.8074889