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Growth and characterization of hydrogenated amorphous silicon prepared using a combined hot wire and electron cyclotron resonance plasma deposition technique

Authors :
Matthew Alan Ring
Publication Year :
2020
Publisher :
Iowa State University, 2020.

Subjects

Subjects :
Amorphous silicon
chemistry.chemical_compound
Materials science
chemistry
business.industry
Optoelectronics
Plasma deposition
business
Electron cyclotron resonance
Characterization (materials science)

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........b1d4f8e4afdcfc6d25a0d4682425a33c
Full Text :
https://doi.org/10.31274/rtd-20200803-335
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