New Evaporation Technology for Rear Side Metallization of High Efficiency Solar Cells

27th European Photovoltaic Solar Energy Conference and Exhibition; 1185-1187
SINGULUS developed a new evaporation technology for metals that provides high thickness uniformity while parasitic chamber deposition is significantly reduced. The results enable the design of evaporation tools for mass production of next generation solar cells with high uptime and high throughput. The paper reviews the fundamental problem with conventional evaporation and describes the principal and advantages of our new technology. We present data on layer characteristics like thickness distribution, sheet resistance, growth of the deposited metal layer and temperature impact on the wafer. Furthermore we compare our development with a standard evaporator tool. Finally an outlook on machine concepts for either laboratory applications up to mass production tools is given.