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High Resolution 3D Surface Imaging Using Variable Structured Illumination via Lissajous Scanning MEMS Mirror Module
- Source :
- 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2019
- Publisher :
- IEEE, 2019.
-
Abstract
- We report a high resolution 3D imaging using variable structured illumination via Lissajous scanning MEMS mirror module. The Lissajous scanning MEMS mirror was operated at pseudo-resonant frequencies within the bandwidth. The structured illumination pattern density was controlled by selecting the greatest common divisor (GCD) of two scanning frequencies. Scanning frequency selection with high GCD provides a coarse illumination pattern. The constant pattern was obtained by modulating a laser beam at the least common multiple (LCM) of the two selected scanning frequencies. A low-Q inner mirror provides wide frequency tuning range as well as enables variable structured illumination. 3D stereoscopic image has been successfully obtained by using a variable structured illumination and stereoscopic camera. Structured illumination effectively enhances 3D imaging resolution. This structured illumination module can provide a new breakthrough for 3D MEMS imaging applications.
- Subjects :
- Microelectromechanical systems
Materials science
business.industry
Bandwidth (signal processing)
Stereoscopy
02 engineering and technology
021001 nanoscience & nanotechnology
Structured illumination
01 natural sciences
law.invention
010309 optics
Lissajous curve
Optics
law
0103 physical sciences
Greatest common divisor
0210 nano-technology
business
Frequency modulation
Stereo camera
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........afa9f0398df43daf7535ee4af4ead9ba