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9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO3

Authors :
Michio Kadota
Fuyuko Yamashita
Shuji Tanaka
Source :
2022 IEEE International Ultrasonics Symposium (IUS).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 IEEE International Ultrasonics Symposium (IUS)
Accession number :
edsair.doi...........af40ba19561e2d372976da0e86e4189c

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