Field emission from gated silicon field emitter array induced by sub-nanosecond laser pulses

Authors :: Mikio Takai
Hidetaka Shimawaki
Hidenori Mimura
Fujio Wakaya
Masayoshi Nagao
Yoichiro Neo
Source :: 2016 29th International Vacuum Nanoelectronics Conference (IVNC).
Publication Year :: 2016
Publisher :: IEEE, 2016.
Abstract: Volcano-structured p-type silicon field emitter arrays have been fabricated by etch-back technique and investigated the photoresponse characteristics of electron emission excited by laser pulses. We have observed the current pulses from the device with the same response of the laser pulse.

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