Conductive Atomic Force Microscopy (C-AFM) observation of conducting nanofilaments formation in GeSbTe phase change materials

GST (GeSbTe) thin films were deposited on glass substrates by electron beam evaporation; Ni was used as the top and bottom electrodes. The I–V (current–voltage) characteristic of the phase change memory (PCM) cell was measured; results showed an electrical threshold switching characteristic for the sample with a threshold voltage of 3.08 V. The threshold switching is attributed to the formation of conductive filaments in the amorphous matrix. Current-voltage spectra which were obtained by C-AFM show that the GST thin film switching from amorphous to the crystalline phase occurs at 1.51 V. C-AFM was used to fabricate crystalline nanoarrays on the sample surface and examine the electrical properties of arrays. In the I–V measurements by C-AFM, when the applied voltage is higher than threshold voltage, conducting nanofilaments with average sizes of 15–60 nm were formed and crystallized spots with current signals were observed. Different times of I–V spectroscopies were applied on thin films to investigate the electrical properties of films during the phase change process. C-AFM results show that as the times of I–V spectroscopies increased, the morphology of crystallized spots changed from bump to pit; the sizes of conductive nanofilaments and detected current signals increased. These results can be attributed to the energy induced by Joule heating dissipated to surrounding films increases with the increasing times of I–V spectroscopies.