Self-assembled and selective-area growth of GaN nanorods by liquid-target reactive magnetron sputter epitaxy (Conference Presentation)

Authors :: Elena Alexandra Serban
Justinas Palisaitis
Jens Birch
Per Persson
Ching-Lien Hsiao
Muhammad Junaid
Lars Hultman
Source :: Light-Emitting Devices, Materials, and Applications XXIV.
Publication Year :: 2020
Publisher :: SPIE, 2020.

Subjects :: Reactive magnetron
Materials science
business.industry
Sputtering
Optoelectronics
Nanorod
Epitaxy
business
Self assembled

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