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Mechanism and application of capillary-force self-assembly micro/nanofabrication
- Source :
- 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO).
- Publication Year :
- 2016
- Publisher :
- IEEE, 2016.
-
Abstract
- Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.
Details
- Database :
- OpenAIRE
- Journal :
- 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
- Accession number :
- edsair.doi...........adf9b75d8e5f2318d7f29df9d63f3b30
- Full Text :
- https://doi.org/10.1109/3m-nano.2016.7824940