Back to Search
Start Over
Nonlinear Dynamics of Lateral Electrostatic Gap Closing Actuators for Applications in Inchworm Motors
- Source :
- Journal of Microelectromechanical Systems. 31:29-36
- Publication Year :
- 2022
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2022.
- Subjects :
- Mechanical Engineering
Electrical and Electronic Engineering
Subjects
Details
- ISSN :
- 19410158 and 10577157
- Volume :
- 31
- Database :
- OpenAIRE
- Journal :
- Journal of Microelectromechanical Systems
- Accession number :
- edsair.doi...........adf5b3543d5c4a476e666e18a294314c
- Full Text :
- https://doi.org/10.1109/jmems.2021.3130957