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Directional distribution of burgers vectors op dislocation loops in ion-implanted silicon

Authors :
S. Yu. Skiryaev
F. F. Komarov
V. S. Solovev
Source :
Radiation Effects. 58:177-181
Publication Year :
1981
Publisher :
Informa UK Limited, 1981.

Abstract

The possible directional distributions of Burgers vectors of perfect dislocation loops and dipoles formed in the silicon single crystals after ion implantation and annealing have been studied.

Details

ISSN :
00337579
Volume :
58
Database :
OpenAIRE
Journal :
Radiation Effects
Accession number :
edsair.doi...........adf481cd99e6726c47255cedad54789c