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Three-Dimensional Integration of Functional Oxides and Crystalline Silicon for Optical Neuromorphic Computing Using Nanometer-Scale Oxygen Scavenging Barriers
- Source :
- ACS Applied Nano Materials. 4:2153-2159
- Publication Year :
- 2021
- Publisher :
- American Chemical Society (ACS), 2021.
-
Abstract
- Dating to the first reports of epitaxial oxide deposition on Si(001), the integration of complex oxides on silicon has been a fast-moving area of research, where fundamental materials physics is in...
Details
- ISSN :
- 25740970
- Volume :
- 4
- Database :
- OpenAIRE
- Journal :
- ACS Applied Nano Materials
- Accession number :
- edsair.doi...........ad84b13fd7b067bc815e9b6ee6e3d6bf
- Full Text :
- https://doi.org/10.1021/acsanm.0c03459