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Beam Damage by Transmission Electron Microscopy in FinFet Structures

Authors :
Joyce Acoccella
John Bruley
G. Lian
Timothy Yeow
Dong Tang
M. Ali
Steve Boettcher
Ioannis Alexandrou
Source :
Microscopy and Microanalysis. 26:1624-1625
Publication Year :
2020
Publisher :
Oxford University Press (OUP), 2020.

Subjects

Subjects :
Materials science
business.industry
Transmission electron microscopy
Optoelectronics
business
Instrumentation
Beam (structure)

Details

ISSN :
14358115 and 14319276
Volume :
26
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........ac842f89b383dfe1959a073e4bfc1a89
Full Text :
https://doi.org/10.1017/s1431927620018760
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