Defect Analysis of Electric and Photonic Double Layer Substrate made by SIMOX 3D sculpting

MLA

Koichiro Kishima. “Defect Analysis of Electric and Photonic Double Layer Substrate Made by SIMOX 3D Sculpting.” 2006 IEEE International SOI Conferencee Proceedings, Oct. 2006. EBSCOhost, https://doi.org/10.1109/soi.2006.284419.

APA

Koichiro Kishima. (2006). Defect Analysis of Electric and Photonic Double Layer Substrate made by SIMOX 3D sculpting. 2006 IEEE International SOI Conferencee Proceedings. https://doi.org/10.1109/soi.2006.284419

Chicago

Koichiro Kishima. 2006. “Defect Analysis of Electric and Photonic Double Layer Substrate Made by SIMOX 3D Sculpting.” 2006 IEEE International SOI Conferencee Proceedings, October. doi:10.1109/soi.2006.284419.