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Micro- and nanofabrication using Bessel-beam activated photopolymerization
- Source :
- Journal of Laser Applications. 32:022067
- Publication Year :
- 2020
- Publisher :
- Laser Institute of America, 2020.
-
Abstract
- Microfabrication based on photopolymerization is typically achieved by scanning a focal spot within the material point by point, which significantly limits the fabrication speed. In our previous study, the authors explored a method for rapid fabrication of high-aspect-ratio micro- and nanostructures by scanning the Bessel beam in the plane transverse to the direction of beam propagation. However, the structure fabricated by this method suffers from the surface texture. In this work, the origin of these effects is investigated by the in situ measurement of the photopolymerization process. By scanning the laser beam at a speed faster than the polymerization that takes place at any given position, we show that it is possible to eliminate the surface texture and obtain smooth surface finish.
Details
- ISSN :
- 19381387 and 1042346X
- Volume :
- 32
- Database :
- OpenAIRE
- Journal :
- Journal of Laser Applications
- Accession number :
- edsair.doi...........abf33119008d2aaee6e020e6bca8e14f
- Full Text :
- https://doi.org/10.2351/7.0000079