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Micro- and nanofabrication using Bessel-beam activated photopolymerization

Authors :
Xiaoming Yu
Mingman Sun
Meng Zhang
Stephen M. Kuebler
He Cheng
Chun Xia
Source :
Journal of Laser Applications. 32:022067
Publication Year :
2020
Publisher :
Laser Institute of America, 2020.

Abstract

Microfabrication based on photopolymerization is typically achieved by scanning a focal spot within the material point by point, which significantly limits the fabrication speed. In our previous study, the authors explored a method for rapid fabrication of high-aspect-ratio micro- and nanostructures by scanning the Bessel beam in the plane transverse to the direction of beam propagation. However, the structure fabricated by this method suffers from the surface texture. In this work, the origin of these effects is investigated by the in situ measurement of the photopolymerization process. By scanning the laser beam at a speed faster than the polymerization that takes place at any given position, we show that it is possible to eliminate the surface texture and obtain smooth surface finish.

Details

ISSN :
19381387 and 1042346X
Volume :
32
Database :
OpenAIRE
Journal :
Journal of Laser Applications
Accession number :
edsair.doi...........abf33119008d2aaee6e020e6bca8e14f
Full Text :
https://doi.org/10.2351/7.0000079