Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs

Prototypes of VO2-based bolometric detectors with lateral dimensions of 25 X 25, 30 X 30, 35 X 35, 40 X 40 and finally 50 X 50 micrometers2 and fill factors approaching 90% are presented. These detectors are grouped in hardwired linear arrays as large as 512 X 1 pixels. Under DC biasing, the fabricated detectors, even the smallest ones, exhibit responsivities from 48,000 to 120,000 VW-1, detectivities in the range of 1.5 X 108 cm Hz1/2W-1 and response times in the range of 5 ms. These new bolometric detector structures contain hidden-legs placed completely underneath the bolometer platform. Results of simulations of the mechanical, optical and electrical properties of these new detector structures are presented. A complete detector fabrication process flow is described.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.