CMOS-compatible, low-loss deuterated silicon nitride photonic devices for optical frequency combs

We demonstrate plasma-deposited (temperature < 300°C), deuterated silicon nitride waveguides with 0.22 dB/cm propagation loss at λ = 1552 nm. Pumping at λ = 1560 nm, we obtain a 550 nm-bandwidth Kerr-microcomb and octave-spanning supercontinuum.