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Microcrystalline silicon prepared at magnetic field modified nucleation

Authors :
H. Stuchlíková
Jan Kočka
Jiří Stuchlík
Antonín Fejfar
Tomáš Mates
Martin Ledinský
Source :
Journal of Non-Crystalline Solids. 352:901-905
Publication Year :
2006
Publisher :
Elsevier BV, 2006.

Abstract

We present a complex characterization of thin silicon films, the growth of which has been influenced by permanent magnet, placed under the substrate. The pattern of microcrystalline regions in otherwise amorphous film varied with the orientation of the magnetic field. Study by atomic force microscopy and by micro-Raman spectroscopy revealed that the microcrystalline regions resulted from increased nucleation density of crystalline grains at the locations where the magnetron effect could be expected. This phenomenon allowed us to study in detail the transition between amorphous and microcrystalline growth. Moreover, it can be used as a kind of ‘magnetic lithography’ for preparation of predefined microcrystalline patterns in otherwise amorphous silicon films.

Details

ISSN :
00223093
Volume :
352
Database :
OpenAIRE
Journal :
Journal of Non-Crystalline Solids
Accession number :
edsair.doi...........aad96defeafe81b84df5ed1a5e87e871
Full Text :
https://doi.org/10.1016/j.jnoncrysol.2005.11.071