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Closed-loop Optical Control Of Ai/sub x/Ga/sub 1-x/As Composition During Crystal Growth By OMMBE

Authors :
W. E. Quinn
David E. Aspnes
S. Gregory
Source :
LEOS '90. Conference Proceedings IEEE Lasers and Electro-Optics Society 1990 Annual Meeting.
Publication Year :
2005
Publisher :
IEEE, 2005.

Subjects

Subjects :
Signal generator
Materials science
Optical control
business.industry
Ellipsometry
Semiconductor materials
Control system
Optoelectronics
Crystal growth
Composition (combinatorics)
business
Closed loop

Details

Database :
OpenAIRE
Journal :
LEOS '90. Conference Proceedings IEEE Lasers and Electro-Optics Society 1990 Annual Meeting
Accession number :
edsair.doi...........aa7d3108f92682780ac8443640ed3c62
Full Text :
https://doi.org/10.1109/leos.1990.690682
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