Influence of the involuntary underetching on the mechanical properties of tunable Fabry-Perot filters for optical communications

MLA

Paolo Bondavalli, et al. “Influence of the Involuntary Underetching on the Mechanical Properties of Tunable Fabry-Perot Filters for Optical Communications.” Journal of Microelectromechanical Systems, vol. 10, June 2001, pp. 298–301. EBSCOhost, https://doi.org/10.1109/84.925789.

APA

Paolo Bondavalli, T. Benyattou, & R. LeDantec. (2001). Influence of the involuntary underetching on the mechanical properties of tunable Fabry-Perot filters for optical communications. Journal of Microelectromechanical Systems, 10, 298–301. https://doi.org/10.1109/84.925789

Chicago

Paolo Bondavalli, T. Benyattou, and R. LeDantec. 2001. “Influence of the Involuntary Underetching on the Mechanical Properties of Tunable Fabry-Perot Filters for Optical Communications.” Journal of Microelectromechanical Systems 10 (June): 298–301. doi:10.1109/84.925789.