Improved Z-axis Resolution in Serial Block Face SEM with Dual Primary Energies and Monte Carlo Simulation of Electron Scattering

Subjects

Subjects :

010302 applied physics
Materials science
Monte Carlo method
Resolution (electron density)
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Computational physics
Dual (category theory)
law.invention
law
0103 physical sciences
Block face
Cartesian coordinate system
0210 nano-technology
Instrumentation
Electron scattering

Details

ISSN :

14358115 and 14319276

Volume :

24

Database :

OpenAIRE

Journal :

Microscopy and Microanalysis

Accession number :

edsair.doi...........a9da4edc9e90bc929c418a5925393584