An Achievement of Low Resistance Non-Salicide CT on Active Area

MLA

Bingquan Wang, et al. “An Achievement of Low Resistance Non-Salicide CT on Active Area.” 2022 China Semiconductor Technology International Conference (CSTIC), June 2022. EBSCOhost, https://doi.org/10.1109/cstic55103.2022.9856811.

APA

Bingquan Wang, Simmons Zhang, & Zhigao Wang. (2022). An Achievement of Low Resistance Non-Salicide CT on Active Area. 2022 China Semiconductor Technology International Conference (CSTIC). https://doi.org/10.1109/cstic55103.2022.9856811

Chicago

Bingquan Wang, Simmons Zhang, and Zhigao Wang. 2022. “An Achievement of Low Resistance Non-Salicide CT on Active Area.” 2022 China Semiconductor Technology International Conference (CSTIC), June. doi:10.1109/cstic55103.2022.9856811.