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An Achievement of Low Resistance Non-Salicide CT on Active Area

Authors :
Bingquan Wang
Simmons Zhang
Zhigao Wang
Source :
2022 China Semiconductor Technology International Conference (CSTIC).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 China Semiconductor Technology International Conference (CSTIC)
Accession number :
edsair.doi...........a9c0afee7a39f7eb2a129e14aa3fbca8
Full Text :
https://doi.org/10.1109/cstic55103.2022.9856811