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Quantification and Mitigation of Electron-Beam-Induced Carbon Contamination

Authors :
Aaron Marx
Dagmar Gerthsen
Milena Hugenschmidt
Erich A. Müller
Katharina Adrion
Source :
Microscopy and Microanalysis. 27:2022-2024
Publication Year :
2021
Publisher :
Oxford University Press (OUP), 2021.

Subjects

Subjects :
Carbon contamination
Materials science
Radiochemistry
Cathode ray
Instrumentation

Details

ISSN :
14358115 and 14319276
Volume :
27
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........a952f363ebb872af286bdfbaa97a586b
Full Text :
https://doi.org/10.1017/s1431927621007352
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