Si photonic wire components and microfilters on SOI substrate

We designed and fabricated some components and devices by using Si photonic wire waveguides on SOI substrate. Because of the very high index contrast between the core and claddings, the waveguide allows a μ-bend. We applied this bend to form a μ-branch and μ-intersection, which exhibited a low of less than 0.3 dB in the experiment. The H-tree optical signal distribution circuit, the Mach-Zehnder interferometer, and the arrayed waveguide grating demultiplexer were demonstrated by this waveguide, for the first time. Although a more careful design and precise fabrication technologies are necessary for future high performance, this waveguide is expected to miniaturize any kind of conventional silica based devices by a factor over 10000 and realize more sophisticate functions by the dense integration of devices.