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Nanosecond time-resolved two-dimensional temperature estimation of nanosecond laser-irradiated silicon
- Source :
- Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII.
- Publication Year :
- 2023
- Publisher :
- SPIE, 2023.
Details
- Database :
- OpenAIRE
- Journal :
- Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII
- Accession number :
- edsair.doi...........a8869378aa0eb42376330d483ceedc07
- Full Text :
- https://doi.org/10.1117/12.2648631