Synthesis and assembly of ZnO nanorods grown by ALD for biosensor application

There is great interest in fabrication of semiconducting and piezoelectric nano-scale structures such as nanowires, nanorods and nanotubes [1–3]. These find applications ranging from sensors to sub-micron electronic devices such as field effect transistors (FET), switches, memory elements, logic arrays and MEMS. In all of these diverse applications nanostructured zinc oxide (ZnO) materials attract broad attention. This ongoing attention is justified by several unique multifunctional properties of ZnO [1]. Moreover, ZnO nanostructures such as quantum dots, wires, belts and nanotubes can be easily fabricated using Atomic Layer Deposition (ALD) over a wide range of templates such as nanoporous Anodic Aluminum Oxide (AAO).