Wet releasing and stripping SU-8 structures with a nanoscale sacrificial layer

MLA

Katsuhiko Tanaka, et al. “Wet Releasing and Stripping SU-8 Structures with a Nanoscale Sacrificial Layer.” Microelectronic Engineering, vol. 86, Nov. 2009, pp. 2232–35. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........a7e4dab316e3cb848e76fa2536a43a17&authtype=sso&custid=ns315887.

APA

Katsuhiko Tanaka, Xuhan Dai, Susumu Sugiyama, Xiaolin Zhao, & Peihong Wang. (2009). Wet releasing and stripping SU-8 structures with a nanoscale sacrificial layer. Microelectronic Engineering, 86, 2232–2235.

Chicago

Katsuhiko Tanaka, Xuhan Dai, Susumu Sugiyama, Xiaolin Zhao, and Peihong Wang. 2009. “Wet Releasing and Stripping SU-8 Structures with a Nanoscale Sacrificial Layer.” Microelectronic Engineering 86 (November): 2232–35. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........a7e4dab316e3cb848e76fa2536a43a17&authtype=sso&custid=ns315887.