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High-Performance On-Chip Supercapacitors Based on Mesoporous Silicon Coated with Ultrathin Atomic Layer-Deposited In2O3 Films
- Source :
- ACS Applied Materials & Interfaces. 11:747-752
- Publication Year :
- 2018
- Publisher :
- American Chemical Society (ACS), 2018.
-
Abstract
- On-chip supercapacitors have attracted considerable attention because of their high power density, long cycling life, and compatibility with integrated circuits. One critical drawback that restrict...
- Subjects :
- Supercapacitor
Materials science
Silicon
Compatibility (geochemistry)
chemistry.chemical_element
Nanotechnology
02 engineering and technology
Integrated circuit
High power density
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
0104 chemical sciences
law.invention
Atomic layer deposition
chemistry
law
General Materials Science
0210 nano-technology
Mesoporous material
Layer (electronics)
Subjects
Details
- ISSN :
- 19448252 and 19448244
- Volume :
- 11
- Database :
- OpenAIRE
- Journal :
- ACS Applied Materials & Interfaces
- Accession number :
- edsair.doi...........a73b0c8f7dbdb18d48c8326e37003810