Cite
Effect of growth temperature on the characteristics of ZnO films grown on Si(111) substrates by metal-organic chemical vapor deposition
MLA
J. J. Zhu, et al. “Effect of Growth Temperature on the Characteristics of ZnO Films Grown on Si(111) Substrates by Metal-Organic Chemical Vapor Deposition.” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 26, Mar. 2008, pp. 224–27. EBSCOhost, https://doi.org/10.1116/1.2835090.
APA
J. J. Zhu, A. Yu. Kuznetsov, Zhuxi Fu, Ran Yao, In Hwan Lee, & Haiyan Song. (2008). Effect of growth temperature on the characteristics of ZnO films grown on Si(111) substrates by metal-organic chemical vapor deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 26, 224–227. https://doi.org/10.1116/1.2835090
Chicago
J. J. Zhu, A. Yu. Kuznetsov, Zhuxi Fu, Ran Yao, In Hwan Lee, and Haiyan Song. 2008. “Effect of Growth Temperature on the Characteristics of ZnO Films Grown on Si(111) Substrates by Metal-Organic Chemical Vapor Deposition.” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26 (March): 224–27. doi:10.1116/1.2835090.