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In Situ Observation of Two-Dimensional Electron Gas Creation at the Interface of an Atomic Layer-Deposited Al2O3/TiO2 Thin-Film Heterostructure
- Source :
- Chemistry of Materials. 32:7662-7669
- Publication Year :
- 2020
- Publisher :
- American Chemical Society (ACS), 2020.
-
Abstract
- A two-dimensional electron gas (2DEG) was formed at the interface of an ultrathin Al2O3/TiO2 heterostructure that was fabricated using atomic layer deposition (ALD) at a low temperature (
- Subjects :
- In situ
Materials science
business.industry
General Chemical Engineering
Interface (computing)
Physics::Optics
Heterojunction
02 engineering and technology
General Chemistry
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
Computer Science::Other
0104 chemical sciences
Condensed Matter::Materials Science
Atomic layer deposition
Condensed Matter::Superconductivity
Physics::Atomic and Molecular Clusters
Materials Chemistry
Optoelectronics
Thin film
0210 nano-technology
business
Fermi gas
Layer (electronics)
Subjects
Details
- ISSN :
- 15205002 and 08974756
- Volume :
- 32
- Database :
- OpenAIRE
- Journal :
- Chemistry of Materials
- Accession number :
- edsair.doi...........a6930d22a7a3892eaf390fff12b8a9a4
- Full Text :
- https://doi.org/10.1021/acs.chemmater.0c01572