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Evaluation of Metallic Nano-Lawn Structures for Application in Microelectronic Packaging
- Source :
- 2006 1st Electronic Systemintegration Technology Conference.
- Publication Year :
- 2006
- Publisher :
- IEEE, 2006.
-
Abstract
- New applications of template-generated structures and surfaces are foreseen in microelectronic joining, photonics, and analytical chemistry. They require a special tuning of morphological and topological parameters. High-resolution imaging techniques allow for optimising surface properties and grain size of metal-rod decorated surfaces. Submicron wires and more complex "lawn"-structures with diameters of 600 ? 50 nm have been produced by galvanic deposition at porous polymer templates. Their application for low-temperature interconnect formation is under evaluation. First results indicate that single-metal and layered "nano-lawn" can be attractive for microsystem technology in general, but also in analytical chemistry and related fields. Template techniques are discussed and experimental approaches to use gold nano-lawn are presented. The development of new materials and appropriate techniques will be useful for future packaging technologies of (micro-)electronics to come.
Details
- Database :
- OpenAIRE
- Journal :
- 2006 1st Electronic Systemintegration Technology Conference
- Accession number :
- edsair.doi...........a565ae0ddd5fc637f59eadb1b9079aa7