Wafer-level fabrication of nanocone forests by plasma repolymerization technique for surface-enhanced Raman scattering devices

This work presents a novel type of surface-enhanced Raman scattering (SERS) devices based on nanocone forests. The nanocone forests are fabricated by using a plasma repolymerization technique, which is a simple and parallel approach that has high reproducibility in wafer-level fabrication. The nanocone forest-based SERS devices exhibit an averaged enhancement factor at the order of 3 × 106, meanwhile, the relative standard deviation of Raman intensity over large areas is around 7%. These experimental results demonstrate great potential of the nanocone forest-based SERS devices in wide applications.