Electron-optical design for the SCALPEL proof-of-concept tool

MLA

Lloyd R. Harriott, et al. “Electron-Optical Design for the SCALPEL Proof-of-Concept Tool.” SPIE Proceedings, Sept. 1995. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........a5122f39408e23ce7a5d8c138091efe6&authtype=sso&custid=ns315887.

APA

Lloyd R. Harriott, Masis Mkrtchyan, W. K. Waskiewicz, J. M. Gibson, Steven D. Berger, & Stephen W. Bowler. (1995). Electron-optical design for the SCALPEL proof-of-concept tool. SPIE Proceedings.

Chicago

Lloyd R. Harriott, Masis Mkrtchyan, W. K. Waskiewicz, J. M. Gibson, Steven D. Berger, and Stephen W. Bowler. 1995. “Electron-Optical Design for the SCALPEL Proof-of-Concept Tool.” SPIE Proceedings, September. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........a5122f39408e23ce7a5d8c138091efe6&authtype=sso&custid=ns315887.