Influence of Long-Range Lateral Ordering in Structures with Quantum Dots on the Spatial Distribution of Diffracted X-Ray Radiation

Perfectly crystalline (InAs–GaAs) multilayer periodic structures on (001) GaAs, which contain InAs quantum dots (QDs), have been studied by high-resolution X-ray diffraction. It has been shown that the existence of such scattering objects as QDs strongly influences X-ray diffraction, changing the spatial distribution of scattered radiation. Additional long-range ordering in layers containing QDs results in unusual and significant elongation of superlattice and substrate reflections in the q x direction. A novel qualitative model of scattering layers consisting of perfect InAs and GaAs coherent clusters has been developed.